Micro Mass Flow Meter

The compact design provides user friendly installation for multiple flow channel sensing requirements.  Plastic finishing with an easy change of the mechanical adaptors enables applications with different connection thread requirements or one-touch approach.  The meters can be used for electronic meters in anesthesia equipment’s, environmental samplers and many other industrial applications.

The meters can be customized with flow range, gas specific requirements, user interface and others upon requests to SRS.


SRS’s Micro Mass Flow Meter is a highly engineered instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics.

It has, ease of operation, field configuration, multi-gas capability and application flexibility are standard features.

It accuracy is a standard calibration over the entire flow range. The low pressure flow meter has a strong and flexible control valve with accessible PID valve tuning to assure best speed and reliability.  Custom valve orifice sizing yields full-range stability.

Micro Mass Flow Meter measures and controls micro mass flows of gas previously thought to be too low for a reliable reading.  It is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.08 sccm (smlm).


All clean gases including corrosives & toxics; specify when ordering. The following ten gases make up the feature of every Micro Mass Meter instrument; up to nine alternate gases may be substituted.



  • Measure and control flow rates down to 0.1 sccm (smlm)
  • Increase efficiency with true, digital high-performance
  • Navigate easily with large multifunction display interface
  • Save time by making adjustments in the field
  • Configure up to 10 gasses with one instrument

Industries: General Research / Analytical / Life Sciences & Health / Biopharmaceutical / Life Science / Medical Devices



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