Micro Mass Flow Meter

$ 1,236.00$ 1,376.00


Micro Mass Flow MeterSRS’s Micro Mass Flow Meter is a highly engineered instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxins.

It has, ease of operation, field configuration, multi-gas capability, and application flexibility are standard features.

Its accuracy is a standard calibration over the entire flow range.  The low-pressure flow meter has a strong and flexible control valve with accessible PID valve tuning to ensure the best speed and reliability.  Custom valve orifice sizing yields full-range stability.

Micro Mass Flow Meter measures and controls micro mass flows of gas previously thought to be too low for a reliable reading.  It is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.08 sccm (smlm).

Micro Mass Flow Meter – Gas

All clean gases including corrosives & toxics; are specified when ordering.  The following ten gases make up the feature of every Micro Mass Meter instrument; up to nine alternate gases may be substituted.

A micro mass flow meter is a highly advanced device used to measure the flow rate of fluids in very small quantities.  It operates on the principle of mass flow measurement, which calculates the mass of the fluid passing through the meter per unit of time.

The design and construction of a micro mass flow meter involve highly sensitive components and advanced microelectromechanical systems (MEMS) technology.  The compact size of these meters allows for precise measurements in applications where space is limited or where low flow rates are encountered.


One important component of a micro-mass flow meter is the flow sensor.  This sensor is typically equipped with a microchannel that directs the flow of the fluid through it.  The microchannel is designed to minimize flow disturbances and pressure losses, ensuring precise and accurate measurements.

To measure the mass flow rate, the fluid is forced through the microchannel, and the pressure differential across the sensor is measured.  This pressure drop is directly proportional to the flow rate, allowing for accurate mass flow calculations.  The sensor’s sensitivity is further enhanced by integrating thin-film thermal elements, such as microheaters and temperature sensors, to detect changes in the fluid’s thermal properties as it flows through the microchannel.

The measurements obtained from a micro mass flow meter are highly precise and accurate.  These meters can typically measure flow rates ranging from a few nanoliters per minute to several milliliters per minute.  This exceptional sensitivity makes them ideal for various applications, including pharmaceutical research, chemical analysis, fuel cell testing, and medical diagnostics.


Additionally, micro mass flow meters can be equipped with various additional features and functionalities to meet specific application requirements.  Some meters may include built-in temperature and pressure sensors to further enhance the accuracy.  It will allow measurements and provide comprehensive data on the fluid properties.

Furthermore, micro mass flow meters are often designed to be compatible with different types of fluids, including liquids and gases.  They can accommodate a wide range of fluid viscosities and temperatures, ensuring accurate measurements across various operating conditions.

When it comes to installation and operation, micro mass flow meters are typically easy to install, thanks to their compact size and lightweight nature.  They can be easily integrated into existing systems or used as standalone devices, depending on the specific application.

Moreover, micro mass flow meters often come with user-friendly interfaces for convenient operation and data analysis.  Many models offer digital displays or output signals that can be connected to external devices for data logging or further processing.


In terms of maintenance, micro-mass flow meters are designed for long-term stability and reliability.  However, periodic calibration and cleaning may be required to ensure continued accuracy.  Manufacturers generally provide guidelines and recommendations for maintenance procedures specific to their devices.

The technology behind micro mass flow meters has advanced significantly in recent years.  It is important to note that the information provided above is based on general insights.  Also,  knowledge about mass flow measurement is important.  Specific details about the features, specifications, and performance of individual micro mass flow meters.  It is always recommended to refer to the product manual or consult the manufacturer directly.


In conclusion, micro mass flow meters are highly sophisticated instruments that enable precise and accurate measurement.  They are also accurate with flow rates in small fluid volumes.  Their compact size, sensitivity, and compatibility with different fluids make them invaluable tools in a wide range of industries.  They are used in pharmaceutical research, chemical analysis, or medical diagnostics.   Micro-mass flow meters contribute to improved efficiency, enhanced control, and cost savings.

Additional information

Weight 2.1 lbs
Dimensions 6 × 2 × 4.5 in

1/4", 3/8", 1/2", 3/4"


24VDC, Battery


4-20MA, Pulse

Flow Rate

0-65 NL/Min, 0-200 NL/Min, 0-500 NL/Min, 0-800 NL/Min


Modbus RS485, Wireless

QC Certificate

No, Yes

Media Type

Gas, Liquid



  • Measure and control flow rates down to 0.1 sccm (smlm)
  • Increase efficiency with true, digital high-performance.
  • Navigate easily with a large multifunction display interface.
  • Save time by adjusting in the field.
  • Configure up to 10 gases with one instrument.

Industries:  General Research / Analytical / Life Sciences & Health / Biopharmaceutical / Life Science / Medical Devices

Thermal Mass Gas Flow Meter with Valve Option

Suitable for a variety of Dry, Clean Gases (User Configurable)

DN6, 0 – 20 SLPM (42.38 SCFH, 1.20 NCMH)
Hi/Low Alarm configuration (Visual & Audible alert)
1/4″ BSP (or NPT)

Thermal Mass Flow Measurement,

RS485 Modbus RTU output option
Integrated Valve option
4x AA Batteries or USB Type-C Powered

  • Accuracy ±(2.0+0.5FS) %
  • Repeatability 0.5 %
  • Turn-down ratio 80:1
  • Response time ​
  • Working temperature -10~55 °C
  • Maximum pressure 0.8 MPa (8 Bar)
  • Humidity <95%RH noncondensing
  • Maximum overflow MF5706=100 MF5708=200 MF5712=400 L/min
  • Maximum flow change MF5706=15 MF5708=30 MF5712=60 L/min
  • Pressure loss MF5706=0.6 MF5708=1.0 MF5712=2.0 kPa
  • Power supply 4-AA batteries (LR6) / 5~24 Vdc
  • Power consumption >60 (on batteries) per day
  • Power/data interface USB Type-C
  • Digital RS485 Modbus half-duplex
  • Wireless options LoRa / WIFI / NB-IoT / BT LE Display
  • LCD Resolution 0.01 L/min (instant) / 1 L (accumulated)
  • Mechanical connection MF5706=BSPP 1/4 BSPP MF5708=3/8” MF5712=BSPP 1/2”
    or MF5706=NPT 1/4” or MF5708=NPT3/8” or MF5712=NPT/ 1/2”
  • Storage temperature -20 ~ 70 °C
  • Calibration Reference conditions 20°C, 101.325 kPa, air
  • Ingress Protection IP50
  • Gas compatibility non-corrosive
  • CE EN61326-1; -2; -3


A Q&A Micro Mass Flow Meter, which stands for “question and answer for Micro Mass Flow Meter,” is a format commonly used to facilitate communication and exchange of information. In a Q&A, one person asks a question, and another person or group provides an answer or response to that question. This format is widely used in various contexts, such as interviews, discussions, presentations, or online forums. It allows for a structured and organized way of addressing inquiries and obtaining relevant information. Is there anything specific you would like to know about the Q&A Micro Mass Flow Meter?

Q: What is a micro mass flow meter?

A: A micro mass flow meter is a type of flow meter designed to accurately measure very low flow rates, typically in the range of microliters per minute to a few milliliters per minute. They are often used in applications where precise control of fluid flow is critical. This includes microfluidics, lab-on-a-chip devices, and medical instrumentation.

Q: How do micro mass flow meters work?

A: Micro mass flow meters work by measuring the flow of fluid through a small channel or tube using various sensing techniques, such as thermal, Coriolis, or pressure-based methods. They typically incorporate microfabrication techniques to create microfluidic channels and structures on a small chip or device, allowing for highly accurate and sensitive flow measurements.

Q: What are some applications for micro mass flow meters?

A: Micro mass flow meters are commonly used in a variety of industries, including medical and pharmaceutical research. They are also commonly used in chemical processing and environmental monitoring. They are often used to measure the flow of very small volumes of fluids in laboratory experiments. In addition, it may also be used in the manufacturing of microscale devices.

Q: What are the advantages of using micro mass flow meters?

A: Micro mass flow meters offer several advantages over traditional flow meters, including high accuracy. Another advantage would be sensitivity, and rangeability, as well as low power consumption and small size.  They are well-suited for use in microfluidic devices and other applications where space is limited, and precise control of fluid flow is critical.

Q: What factors should be considered when selecting a micro mass flow meter?

A: When selecting a micro mass flow meter, several factors should be considered. Considerations that include the specific application, the type of fluid being measured, the flow rate and range, and the required accuracy and resolution.  Other factors to consider include the operating temperature and pressure range.  In addition, it will consider the type of output signal required and the installation and maintenance requirements.

Q: Can micro mass flow meters measure the flow of gases and liquids?

A: Yes, micro mass flow meters can measure the flow of both gases and liquids.  They are commonly used to measure low flow rates of gases such as oxygen, nitrogen, and carbon dioxide, as well as liquids such as water, oil, and chemical solutions.

Q: How accurate are micro mass flow meters?

A: Micro mass flow meters are highly accurate and can typically achieve measurement accuracies of 1-2% or better. However, this depends on the specific type and design. Some micro mass flow meters can achieve even higher accuracies.  This particularly occurs when used in conjunction with calibration techniques and advanced signal-processing algorithms.

Q: How are micro mass flow meters calibrated?

A: Micro mass flow meters are typically calibrated using precision reference standards and techniques, such as gravimetric, volumetric, or tracer gas methods.  The calibration process involves comparing the output of the flow meter to the known flow rate of the reference standard.  Once that is known, it adjusts the meter’s signal processing algorithms as necessary to achieve accurate and reliable flow measurements.

Q: What are some limitations of using micro mass flow meters?

A: One limitation of micro mass flow meters is that they may not be suitable for measuring high flow rates.  In addition, they may not be suitable for flows of viscous or dense fluids. They may also be more sensitive to changes in temperature, pressure, and other environmental factors compared to larger flow meters.  Additionally, the small size and complexity of micro-mass flow meters may make them more expensive. This makes it challenging to manufacture and maintain.

Buy Coriolis Flow Meters

Advantages / Disadvantages

Micromass flow meters are instruments used for measuring the flow rate of gases or liquids in small-scale applications. Here are some advantages and disadvantages of micro mass flow meters:


High Accuracy:  Micro mass flow meters are known for their precise measurement capabilities, making them ideal for applications where accuracy is crucial.

Compact Size:  These meters are designed to be small and portable, making them suitable for use in space-constrained environments.

Wide Range of Applications:  Micro mass flow meters can be used in various industries such as medical devices, biotechnology, automotive, and more.

Low Flow Measurement:  They are capable of measuring very low flow rates accurately, which is beneficial for many applications that deal with small quantities of fluids.

Furthermore, micro mass flow meters offer several advantages over traditional flow measurement techniques.  Their small size and low power consumption enable integration into portable devices and systems, making them suitable for on-site measurements and remote monitoring applications.  They also provide real-time flow data, allowing for instant feedback and control of critical processes.

The use of micro-mass flow meters can lead to increased efficiency and cost savings in various industries.  For instance, in pharmaceutical research, precise flow control is critical for ensuring accurate dosing of medications and reducing waste.  In fuel cell testing, accurate flow measurements are necessary to optimize fuel cell performance and improve energy efficiency.

In conclusion, a micro mass flow meter is a highly advanced instrument used for precise and accurate measurement of flow rates in small fluid volumes.  With their compact size, high sensitivity, and real-time flow data, these meters offer significant advantages over traditional flow measurement techniques.  They play a crucial role in various industries, contributing to improved efficiency and cost savings.


Cost:  Micro mass flow meters can be more expensive compared to traditional flow meters due to their advanced technology and precision.

Sensitivity to Contaminants:  Some micro mass flow meters can be sensitive to impurities or contaminants in the fluid being measured, which may affect their accuracy over time.

Calibration:  These instruments may require frequent calibration to maintain their accuracy, which can be time-consuming and costly.

Pressure Drop:  Using a micro mass flow meter can sometimes result in a pressure drop in the system being measured, affecting overall system performance.

It’s essential to consider these factors when selecting a micro mass flow meter for your specific application to ensure optimal performance and reliability.


Micro Mass Flow Meters Applications suitable for:

  • Precision Measurement & Control
  • Gas Mixing & Blending
  • Ultra Low Flow Control
  • Artificial Atmospheres
  • Research

Micro Mass Flow Meters are precision instruments used for measuring low flow rates of gases or liquids in various applications requiring accuracy and reliability.  Here are some common applications for a Micro Mass Flow Meter:

Medical Devices:  Micro Mass Flow Meters are utilized in medical equipment such as respiratory devices, anesthesia machines, ventilators, and gas analyzers to monitor and control the flow of gases for patient treatment, diagnostics, and medical research.

Analytical Instruments:  In laboratories, research facilities, and pharmaceutical companies, Micro Mass Flow Meters are integrated into gas chromatographs, mass spectrometers, spectrophotometers, and other analytical instruments for precise gas flow control, sample analysis, and process optimization.

Fuel Cell Testing:  Micro Mass Flow Meters play a critical role in fuel cell testing and hydrogen research applications to measure gas flow rates, composition, and hydrogen purity levels for fuel cell efficiency studies, stack performance evaluation, and alternative energy development.

Semiconductor Manufacturing:  Micro Mass Flow Meters are essential in semiconductor fabrication processes, cleanrooms, and wafer manufacturing facilities to deliver accurate gas flow control for chemical vapor deposition (CVD), etching, ion implantation, and other semiconductor production steps.

Environmental Monitoring:  Micro Mass Flow Meters are employed in environmental monitoring systems, air quality sensors, greenhouse gas analyzers, and emissions testing equipment to measure gas flows, pollutant concentrations, and ambient air quality parameters for environmental assessments and pollution control.

Aerospace and Defense:  Micro-Mass Flow Meters are used in aerospace and defense industries for aircraft fuel systems, rocket propulsion testing, spacecraft life support systems, and military applications requiring precise gas flow measurement, control, and monitoring.

Biotechnology and Life Sciences:  In bioreactors, fermentation processes, cell culture systems, and biopharmaceutical manufacturing, Micro Mass Flow Meters help regulate gas flows, nutrient delivery, and oxygen levels critical for cell growth, protein production, and bioprocess optimization.

Energy Research:  Micro Mass Flow Meters are employed in energy research labs, renewable energy projects, gas turbine testing facilities, and nuclear reactors to measure fuel gas flows, combustion rates, and thermal efficiency for energy generation studies and performance analysis.

Microfluidics and Lab-on-a-Chip Devices:  Micro Mass Flow Meters are integrated into microfluidic systems, lab-on-a-chip devices, and microscale analytical platforms for biological assays, chemical synthesis, drug discovery, and microfabrication applications requiring precise fluid handling and flow control at small volumes.

These applications demonstrate the versatility and importance of Micro Mass Flow Meters in a wide range of industries and research fields where accurate flow measurement, low flow rate control, and precise fluid handling are essential for achieving desired outcomes and advancing technological innovation.





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