Micro Mass Flow Meter

Description

SRS’s Micro Mass Flow Meter is a highly engineered instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics.

It has, ease of operation, field configuration, multi-gas capability and application flexibility are standard features.

It accuracy is a standard calibration over the entire flow range. The low pressure flow meter has a strong and flexible control valve with accessible PID valve tuning to assure best speed and reliability.  Custom valve orifice sizing yields full-range stability.

Micro Mass Flow Meter measures and controls micro mass flows of gas previously thought to be too low for a reliable reading.  It is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.08 sccm (smlm).

Gases

All clean gases including corrosives & toxics; specify when ordering. The following ten gases make up the feature of every Micro Mass Meter instrument; up to nine alternate gases may be substituted.